High-precision thickness measurement of electrically conductive films
The TFG6220 capacitive system measures the thickness of electrically conductive film, e.g. battery films, with maximum precision. A vacuum device sucks in the object to be measured, smoothes it and thus ensures optimum, wrinkle-free support. In this way, the measurement can be performed with the greatest possible precision. The system is used for quality inspection in the form of offline random samples. The TFG6220 is pre-assembled ready for operation and enables a quick start.
Characteristics
- Fast offline inspection of the film thickness
- Resolution: 10 nm
- High repeatability: 1 µm
- Possible film thickness: < 1 mm
- High-precision results thanks to automatic smoothing of the film via vacuum
- An integrated measuring insert enables simple referencing before thickness measurement
- Web interface for intuitive setting and measured value display (no software installation required)
Precise testing for reliable quality
The TFG6220 consists of a measuring bracket including sensors and a capaNCDT controller. The thickness is calculated by offsetting the two capacitive sensors. Automatic smoothing of the measuring object is realized via an externally connected vacuum device. This achieves micrometer-precise results.
The permanently installed capacitive sensor (1) in the upper area of the measuring bracket measures the distance to the measuring object (2). The measuring insert (3) provides a referencing surface over which the object to be measured is sucked in and clamped by means of a vacuum. The capacitive sensor in the lower area (4) measures on the measuring insert and compensates for the mechanical offset of the contact surface.